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MEMS handbook : MEMS introduction and fundamentals

By Gad-el-Hak, Mohamed. Boca Raton: CRC Press, 2006 . various pagings; 26 cm.. 9780849391378

By Gad-el-Hak, Mohamed. Boca Raton: CRC Press, 2006 . various pagings; 26 cm.. 9780849391385

By Gad-el-Hak, Mohamed. Boca Raton: CRC Press, 2006 . various pagings; 26 cm.. 9780849391392