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Silicon processing for the VLSI era. Volume 3

By Wolf, Stanley. California: Lattice Press, 1995 . xxii, 722 p.; 24 cm.. 0961672153

By Wolf, Stanley. California: Lattice Press, 2000 . xxxv, 890 p.; 24 cm.. 0961672161

By Wolf, Stanley. California: Lattice Press, 1990 . xxxi, 753 p.; 24 cm.. 9780961672140

By Wolf, Stanley. California: Lattice Press, 2002 . xxii, 806 p.; 24 cm.. 096167217X