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Middleman, Stanley

Process engineering analysis in semiconductor device fabrication - New York: McGraw-Hill, 1993 - xvii, 774 p.; ill.: 25 cm. - McGraw-Hill chemical engineering series .

ISBN: 9780070418530 (hbk)

Subjects--Topical Terms:
Semiconductors : Design and construction

Dewey Class. No.: 621.38152 / MID