Hsu, Tai-Ran
Mems and microsystems : design, manufacture, and packaging
- 2nd ed.
- Hoboken: John Wiley & Sons, 2008
- xxv, 550 p.; ill.: 24 cm.
9780470083017 (hbk)
Electronics - General
Electronics & communications engineering
Microelectromechanical systems
Microelectronic packaging
Microelectronics
621.381 / HSU