Gad-el-Hak, Mohamed
MEMS handbook : MEMS applications
- 2nd ed.
- Boca Raton: CRC Press, 2006
- various pagings; 3 v., ill.: 26 cm.
- Mechanical engineering .
9780849391392 (hbk)
Microelectromechanical systems -- Handbooks, manuals, etc.
Microelectromechanical systems
Microelectronics
Nanotechnology
621.381 / GAD