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Wolf, Stanley

Silicon processing for the VLSI era. Volume 2 - California: Lattice Press, 1990 - xxxi, 753 p.; ill.: 24 cm.

ISBN: 9780961672140 (hbk)

Subjects--Topical Terms:
Integrated circuits : Very large scale
Semiconductors : etc.hing

Dewey Class. No.: 621.38173 / WOL

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