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Fedder, G. K.

CMOS-MEMS - Weinheim: Wiley-VCH, 2005 - xiv, 594 p.; ill.: 25 cm. - Adanced micro & nanosystems .

ISBN: 9783527310807 (hbk)

Subjects--Topical Terms:
Metal oxide semiconductors, Complementary
Microelectromechanical systems
RF CMOS

Dewey Class. No.: 621.3815 / BRA