Nanoscale devices : fabrication, functionalization, and accessibility from the macroscopic world
- Dordrecht: Springer, 2009
- xvi, 205 p.; ill. (some col.): 24 cm.
- Nanoscience and technology .
9783540927310 (hbk)
Microelectronics Microelectronics -- Mathematics Nanoelectromechanical systems Nanoelectromechanical systems -- Mathematics