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Yoo, Chue San

Semiconductor manufacturing technology - Singapore: World Scientific, 2008 - xii, 470 p.; ill.: 24 cm. - Adanced series in electrical and computer engineering .

ISBN: 9789812568236 (hbk)

Subjects--Topical Terms:
Semiconductor industry
Semiconductors -- Design and construction

Dewey Class. No.: 621.38152 / YOO