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Wolf, Stanley

Silicon processing for the VLSI era. Volume 4 - California: Lattice Press, 2002 - xxii, 806 p.; ill.: 24 cm.

ISBN: 096167217X (hbk)

Subjects--Topical Terms:
Integrated circuits : very large scale
Semiconductors : etc.hing

Dewey Class. No.: 621.38173 / WOL

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