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Baltes, H.
Enabling technology for mems and nanodevices - Weinheim: Wiley-VCH, 2004 - xii, 427 p.; ill.: 25 cm. - Adanced micro & nanosystems .
ISBN:
352730746X (hbk)
Subjects--Topical Terms:
Microelectromechanical systems
Nanotechnology
Dewey Class. No.:
620.5 / BAL
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