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Wolf, Stanley

Silicon processing for the VLSI era. Volume 1 - 2nd ed. - California: Lattice Press, 2000 - xxxv, 890 p.; ill.: 24 cm.

ISBN: 0961672161 (hbk)

Subjects--Topical Terms:
Integrated circuits : very large scale integration
Semiconductors : etc.hing

Dewey Class. No.: 621.38173 / WOL