Yurish, Sergey Y.
Smart sensors and MEMS
- Dordrecht: Kluwer Academic Publishers, 2004
- xv, 480 p.; ill.: 24 cm.
- NATO science series .
1402029284 (pbk)
Detectors -- Congresses
Microelectromechanical systems -- Congresses
Scanning systems -- Congresses
681.2 / YUR