Ensell, Graham
MEMS mechanical sensors
- Boston: Artech House, 2004
- x, 269 p.; : 26 cm.
- Microelectromechanical systems series .
1580535364 (hbk)
Beeby, Stephen
Ensell, Graham
Kraft, Michael
Microelectricalmechanical systems -- Design and construction
Transducers
681.2 / BEE