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Pelesko, John A.

Modeling MEMS and NEMS - Boca Raton: Chapman & Hall, 2002 - xxiii, 357 p.; ill.: 24 cm.

ISBN: 1584883065 (pbk)

Subjects--Topical Terms:
MEMS
Microelectromechanical systems -- Mathematical models
NEMS

Dewey Class. No.: 621.3 / PEL

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