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ULSI Technology

By: Chang, C. Y.
Contributor(s): Sze, S. M.
Material type: materialTypeLabelBookPublisher: New York: McGraw-Hill, 2002Description: 726 p.; Illus. Index: 23 cm.ISBN: 9780071141055 .Subject(s): Assembly and Packaging | Etching | Manufacturing Technology | Process Integration | ReliabilityDDC classification: 621.381
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