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Microchip fabrication : a practical guide to semiconductor processing

By: Van Zant, Peter.
Material type: materialTypeLabelBookPublisher: New York: McGraw-Hill, 2004Edition: 5th ed.Description: xii, 642 p.; ill.: 24 cm.ISBN: 9780071432412 .Subject(s): Integrated circuits -- Design and construction | Semiconductors -- Design and constructionDDC classification: 621.38152
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