Introduction to microelectronic fabrication, Volume 5
By: Jaeger, Richard C.
Material type:
BookSeries: Modular series on solid state deices.Publisher: New Jersey: Prentice Hall, 2002Edition: 2nd ed.Description: 316 p.; Illus. Index.: 23 cm.ISBN: 0201444947 .Subject(s): Defusion | Ion Implantation | Lithography | Microelectronic Fabrication | Packaging and YieldDDC classification: 621.3815
| Item type | Current location | Call number | Status | Date due | Barcode |
|---|---|---|---|---|---|
| Books | 621.3815 JAE (Browse shelf) | Checked out | 15/05/2024 | 003123 |
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