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Details for: Plasma electronics : applications in microelectronic device fabrication
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Plasma electronics : applications in microelectronic device fabrication
By:
Makabe, T
.
Contributor(s):
Petrovic, Z
.
Material type:
Book
Series:
Series in plasma physics
.
Publisher:
New York:
CRC Press,
2014
Description:
339 p.; ill.: 23 cm
.
ISBN:
9780750309769 .
Subject(s):
Plasma engineering
DDC classification:
621.044
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621.044 MAK (
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029627
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621.042 RAM
Smart energy management : a computational approach
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Plasma engineering : applications from aerospace to bio and nanotechnology
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Plasma electronics : applications in microelectronic device fabrication
621.05 IET
IETE Journal of Research
621.05 IET
IETE Journal of Research
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