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Plasma electronics : applications in microelectronic device fabrication

By: Makabe, T.
Contributor(s): Petrovic, Z.
Material type: materialTypeLabelBookSeries: Series in plasma physics.Publisher: New York: CRC Press, 2014Description: 339 p.; ill.: 23 cm.ISBN: 9780750309769 .Subject(s): Plasma engineeringDDC classification: 621.044
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