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MEMS handbook : MEMS design and fabrication

By: Gad-el-Hak, Mohamed.
Material type: materialTypeLabelBookSeries: Mechanical engineering.Publisher: Boca Raton: CRC Press, 2006Edition: 2nd ed.Description: various pagings; 3 v., ill.: 26 cm.ISBN: 9780849391385 .Subject(s): Microelectromechanical systems -- Handbooks, manuals, etc | Microelectromechanical systems | Microelectronics | NanotechnologyDDC classification: 621.381
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Item type Current location Call number Status Date due Barcode
Books 621.381 GAD (Browse shelf) Available 019197

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