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Integrated interconnect technologies for 3D nanoelectronic systems

By: Bakir, Muhannad S.
Contributor(s): Meindl, James D.
Material type: materialTypeLabelBookSeries: Integrated microsystems series.Publisher: Boston: Artech House, 2008Description: xx, 528 p.; ill.: 26 cm.ISBN: 9781596932463 .Subject(s): Interconnects (Integrated circuit technology) | Nanoelectronics | Telecommunication systemsDDC classification: 621.381
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