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Semiconductors for micro- and nanotechnology : an introduction for engineers

By: Korvink, Jan G.
Contributor(s): Greiner, Andreas.
Material type: materialTypeLabelBookPublisher: Weinheim: Wiley-VCH, 2002Description: 340 p.; ill.: 24 cm.ISBN: 9783527302574 .Subject(s): Microtechnology -- Mathematics -- Textbooks | Nanotechnology -- Mathematics -- Textbooks | Semiconductors -- TextbooksDDC classification: 621.38152
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