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Modeling MEMS and NEMS

By: Pelesko, John A.
Contributor(s): Bernstein, David H.
Material type: materialTypeLabelBookPublisher: Boca Raton: Chapman & Hall, 2002Description: xxiii, 357 p.; ill.: 24 cm.ISBN: 1584883065 .Subject(s): MEMS | Microelectromechanical systems -- Mathematical models | NEMSDDC classification: 621.3
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