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Science and Engineering of Microelectronic Fabrication

By: Campbell, Stephen A.
Material type: materialTypeLabelBookPublisher: New York: Oxford University Press, 1996Description: 536 p.; ill., index: 23 cm.ISBN: 0195105087 .Subject(s): CMOS Technology | Vaccum Science and PlasmasDDC classification: 621.38152
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Item type Current location Call number Status Date due Barcode
Books 621.38152 CAM (Browse shelf) Available 005214

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