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Micromachines as tools for nanotechnology

By: Fujita, H.
Material type: materialTypeLabelBookSeries: Microtechnology and MEMS.Publisher: New York: Springer-Verlag, 2004Description: xii, 211 p.; ill.: 23 cm.ISBN: 8181282027 .Subject(s): Microelectromechanical systems | NanotechnologyDDC classification: 620.5
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