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VLSI fabrication principles : silicon and gallium arsenide

By: Ghandhi, Sorab K.
Material type: materialTypeLabelBookPublisher: New York: Wiley-Interscience, 2005Edition: 2nd ed.Description: xxiv, 834 p.; ill.: 23 cm.ISBN: 9814126942 .Subject(s): Gallium arsenide | Integrated circuits -- Very large scale integration | SiliconDDC classification: 621.38152
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