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21.
Foundations of MEMS

by Liu, Chang.

Material type: book Book; Format: print ; Literary form: Not fiction Publisher: New Jersey: Pearson Education, 2006Availability: Items available for loan: [Call number: 621.3 LIU] (1).
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22.
Enabling technology for mems and nanodevices

by Baltes, H.

Material type: book Book; Format: print ; Literary form: Not fiction Publisher: Weinheim: Wiley-VCH, 2004Availability: Items available for loan: [Call number: 620.5 BAL] (1).
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