Science and Engineering of Microelectronic Fabrication
Material type:
TextPublication details: New York: Oxford University Press, 1996Description: 536 p.; ill., index: 23 cmISBN: - 0195105087
- 23 621.38152 CAM
| Cover image | Item type | Current library | Home library | Collection | Shelving location | Call number | Materials specified | Vol info | URL | Copy number | Status | Notes | Date due | Barcode | Item holds | Item hold queue priority | Course reserves | |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Books | DAU | 621.38152 CAM | Available | 005214 |
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