| 000 | 00557nam a2200169Ia 4500 | ||
|---|---|---|---|
| 008 | 161214s9999 xx 000 0 und d | ||
| 020 |
_a9780070418530 _c(hbk) |
||
| 082 |
_223 _a621.38152 _bMID |
||
| 100 | _aMiddleman, Stanley | ||
| 245 | 0 | _aProcess engineering analysis in semiconductor device fabrication | |
| 260 |
_aNew York: _bMcGraw-Hill, _c1993 |
||
| 300 |
_axvii, 774 p.; _bill.: _c25 cm. |
||
| 490 | _aMcGraw-Hill chemical engineering series | ||
| 650 | _aSemiconductors : Design and construction | ||
| 700 | _aHochberg, Arthur K. | ||
| 942 |
_2ddc _cBK |
||
| 999 |
_c10411 _d10411 |
||