000			00523nam a2200193Ia 4500
008			161214s9999 xx 000 0 und d
020			_a9780071003476 _c(pbk)
082			_223 _a621.381 _bSZE
100			_aSze, S. M.
245		0	_aVLSI Technology
260			_aNew York: _bMcGraw-Hill, _c1988
300			_a676 p.; _bIllus. Index.: _c22 cm.
650			_aIntegrated Circuits
650			_aLithgraphy
650			_aMettizalism
650			_aProcess Simulation
650			_aVery Large Scale Integration
942			_2ddc _cBK
999			_c10823 _d10823