| 000 | 00554nam a2200169Ia 4500 | ||
|---|---|---|---|
| 008 | 161214s9999 xx 000 0 und d | ||
| 020 |
_a9780071432412 _c(hbk) |
||
| 082 |
_223 _a621.38152 _bVAN |
||
| 100 | _aVan Zant, Peter | ||
| 245 | 0 | _aMicrochip fabrication : a practical guide to semiconductor processing | |
| 250 | _a5th ed. | ||
| 260 |
_aNew York: _bMcGraw-Hill, _c2004 |
||
| 300 |
_axii, 642 p.; _bill.: _c24 cm. |
||
| 650 | _aIntegrated circuits -- Design and construction | ||
| 650 | _aSemiconductors -- Design and construction | ||
| 942 |
_2ddc _cBK |
||
| 999 |
_c11031 _d11031 |
||