| 000 | 00526nam a2200181Ia 4500 | ||
|---|---|---|---|
| 008 | 161214s9999 xx 000 0 und d | ||
| 020 |
_a9780080964546 _c(hbk) |
||
| 082 |
_223 _a620.50287 _bLEA |
||
| 100 | _aLeach, Richard | ||
| 245 | 0 | _aFundamental principles of engineering nanometrology. | |
| 260 |
_aOxford: _bWilliam Andrew, _c2009 |
||
| 300 |
_axxvi, 321 p.; _bill.: _c24 cm. |
||
| 490 | _aMicro and nano technologies | ||
| 650 | _aMetrology | ||
| 650 | _aMicrotechnology | ||
| 650 | _aNanotechnology | ||
| 942 |
_2ddc _cBK |
||
| 999 |
_c11415 _d11415 |
||