000			00643nam a2200217Ia 4500
008			161214s9999 xx 000 0 und d
020			_a0201444947 _c(pbk)
082			_223 _a621.3815 _bJAE
100			_aJaeger, Richard C.
245		0	_aIntroduction to microelectronic fabrication, Volume 5
250			_a2nd ed.
260			_aNew Jersey: _bPrentice Hall, _c2002
300			_a316 p.; _bIllus. Index.: _c23 cm.
490			_aModular series on solid state deices
650			_aDefusion
650			_aIon Implantation
650			_aLithography
650			_aMicroelectronic Fabrication
650			_aPackaging and Yield
942			_2ddc _cBK
999			_c1297 _d1297