000			00627nam a2200205Ia 4500
008			161214s9999 xx 000 0 und d
020			_a9780387288420 _c(hbk)
082			_223 _a621.38152 _bLAC
100			_aLaconte, J.
245		0	_aMicromachined thin-film sensors for SOI-CMOS co-integration
260			_aDordrecht: _bSpringer, _c2006
300			_axiii, 292 p.; _bill., index: _c25 cm.
650			_aMetal oxide semiconductors, Complementary
650			_aGas flow
650			_aSilicon-on-insulator technology
650			_aThin film devices
700			_aFlandre, Denis
700			_aRaskin, J. -P
942			_2ddc _cBK
999			_c14625 _d14625