000			00617nam a2200193Ia 4500
008			161214s9999 xx 000 0 und d
020			_a9780387362298 _c(hbk)
082			_223 _a621.38152 _bZRI
100			_aZribi, Anis
245		0	_aFunctional thin films and nanostructures for sensors : synthesis, physics and applications
260			_aNew York: _bSpringer, _c2009
300			_axvii, 213 p.; _bill.: _c24 cm.
490			_aIntegrated microanalytical systems
650			_aDetectors
650			_aNanoelectromechanical systems
650			_aThin film devices
700			_aFortin, Jeffrey B.
942			_2ddc _cBK
999			_c14703 _d14703