| 000 | 00523nam a2200169Ia 4500 | ||
|---|---|---|---|
| 008 | 161214s9999 xx 000 0 und d | ||
| 020 |
_a9780470016992 _c(hbk) |
||
| 082 |
_223 _a620.5 _bBAG |
||
| 100 | _aBaglio, Salvatore | ||
| 245 | 0 | _aScaling issues and design of MEMS | |
| 260 |
_aChichester: _bJohn Wiley & Sons, _c2007 |
||
| 300 |
_axiii, 229 p.; _bill.: _c24 cm. |
||
| 650 | _aMicroelectromechanical systems -- Design and construction | ||
| 700 | _aCastorina, Salvatore | ||
| 700 | _aSavalli, Nicolo | ||
| 942 |
_2ddc _cBK |
||
| 999 |
_c15546 _d15546 |
||