000			00579nam a2200193Ia 4500
008			161214s9999 xx 000 0 und d
020			_a9780521020268 _c(pbk)
082			_223 _a621.36 _bTOW
100			_aTownsend, P. D.
245		0	_aOptical effects of ion implantation
260			_aCambridge: _bCambridge University Press, _c1994
300			_axiv, 280 p.; _bill.: _c23 cm.
490			_aCambridge studies in modern optics
650			_aIon implantation
650			_aMaterials -- Optical properties
700			_aChandler, P. J.
700			_aZhang, L.
942			_2ddc _cBK
999			_c16465 _d16465