000			00557nam a2200193Ia 4500
008			161214s9999 xx 000 0 und d
020			_a9780792372462 _c(hbk)
082			_223 _a621.381 _bSEN
100			_aSenturia, Stephen D.
245		0	_aMicrosystem Design
260			_aLondon: _bKluwer Academic Publishers, _c2001
300			_a689 p.; _bIllus. Index.: _c23 cm.
650			_aCircuit and Systems
650			_aMicroelectromechanical Systems
650			_aMicroelectronics
650			_aMicrofabrication
650			_aSystem Design
942			_2ddc _cBK
999			_c18776 _d18776