| 000 | 00562nam a2200181Ia 4500 | ||
|---|---|---|---|
| 008 | 161214s9999 xx 000 0 und d | ||
| 020 |
_a9780815515777 _c(hbk) |
||
| 082 |
_223 _a621 _bBAH |
||
| 100 | _aBahreyni, Behraad | ||
| 245 | 0 | _aFabrication and design of resonant microdevices | |
| 260 |
_aNorwich: _bWilliam Andrew, _c2008 |
||
| 300 |
_axiii, 181 p.; _bill.: _c27 cm. |
||
| 490 | _aMicro & nano technologies | ||
| 650 | _aMicroelectromechanical systems -- Design and construction | ||
| 650 | _aMicrofabrication | ||
| 650 | _aResonance | ||
| 942 |
_2ddc _cBK |
||
| 999 |
_c19001 _d19001 |
||