| 000 | 00539nam a2200169Ia 4500 | ||
|---|---|---|---|
| 008 | 161214s9999 xx 000 0 und d | ||
| 020 |
_a9780815515944 _c(hbk) |
||
| 082 |
_223 _a621.38152 _bLIN |
||
| 100 | _aLindroos, Veikko | ||
| 245 | 0 | _aHandbook of silicon based MEMS : materials and technologies | |
| 260 |
_aNorwich: _bElsevier, _c2010 |
||
| 300 |
_a636 p.; _bill.: _c |
||
| 650 | _aMicroelectromechanical systems | ||
| 650 | _aMicroelectromechanical systems -- Materials | ||
| 650 | _aSilicon -- Electric properties | ||
| 942 |
_2ddc _cBK |
||
| 999 |
_c19002 _d19002 |
||