000			00645nam a2200205Ia 4500
008			161214s9999 xx 000 0 und d
020			_a9780849391385 _c(hbk)
082			_223 _a621.381 _bGAD
100			_aGad-el-Hak, Mohamed
245		0	_aMEMS handbook : MEMS design and fabrication
250			_a2nd ed.
260			_aBoca Raton: _bCRC Press, _c2006
300			_avarious pagings; _b3 v., ill.: _c26 cm.
490			_aMechanical engineering
650			_aMicroelectromechanical systems -- Handbooks, manuals, etc.
650			_aMicroelectromechanical systems
650			_aMicroelectronics
650			_aNanotechnology
942			_2ddc _cREF
999			_c19468 _d19468