000			00485nam a2200157Ia 4500
008			161214s9999 xx 000 0 und d
020			_a9780961672140 _c(hbk)
082			_223 _a621.38173 _bWOL
100			_aWolf, Stanley
245		0	_aSilicon processing for the VLSI era. Volume 2
260			_aCalifornia: _bLattice Press, _c1990
300			_axxxi, 753 p.; _bill.: _c24 cm.
650			_aIntegrated circuits : Very large scale
650			_aSemiconductors : etc.hing
942			_2ddc _cBK
999			_c19738 _d19738