000			00621nam a2200193Ia 4500
008			161214s9999 xx 000 0 und d
020			_a9781596932463 _c(hbk)
082			_223 _a621.381 _bBAK
100			_aBakir, Muhannad S.
245		0	_aIntegrated interconnect technologies for 3D nanoelectronic systems
260			_aBoston: _bArtech House, _c2008
300			_axx, 528 p.; _bill.: _c26 cm.
490			_aIntegrated microsystems series
650			_aInterconnects (Integrated circuit technology)
650			_aNanoelectronics
650			_aTelecommunication systems
700			_aMeindl, James D.
942			_2ddc _cBK
999			_c21263 _d21263