000 00605nam a2200181Ia 4500
008 161214s9999 xx 000 0 und d
020 _a9783527302574
_c(pbk)
082 _223
_a621.38152
_bKOR
100 _aKorvink, Jan G.
245 0 _aSemiconductors for micro- and nanotechnology : an introduction for engineers
260 _aWeinheim:
_bWiley-VCH,
_c2002
300 _a340 p.;
_bill.:
_c24 cm.
650 _aMicrotechnology -- Mathematics -- Textbooks
650 _aNanotechnology -- Mathematics -- Textbooks
650 _aSemiconductors -- Textbooks
700 _aGreiner, Andreas
942 _2ddc
_cBK
999 _c22154
_d22154