000 00503nam a2200169Ia 4500
008 161214s9999 xx 000 0 und d
020 _a9783527309788
_c(hbk)
082 _223
_a620.5
_bFEC
100 _aWerner, Matthias
245 0 _aNano-micro interface : bridging the micro and nano worlds
260 _aWeinheim:
_bWiley-VCH,
_c2004
300 _axxiv, 327 p.;
_bill. (some col.):
_c25 cm.
650 _aMicrotechnology
650 _aNanotechnology
700 _aFecht, Hans-Jorg.
942 _2ddc
_cBK
999 _c22157
_d22157