000			00549nam a2200193Ia 4500
008			161214s9999 xx 000 0 und d
020			_a9783527310807 _c(hbk)
082			_223 _a621.3815 _bBRA
100			_aFedder, G. K.
245		0	_aCMOS-MEMS
260			_aWeinheim: _bWiley-VCH, _c2005
300			_axiv, 594 p.; _bill.: _c25 cm.
490			_aAdanced micro & nanosystems
650			_aMetal oxide semiconductors, Complementary
650			_aMicroelectromechanical systems
650			_aRF CMOS
700			_aBrand, Oliver
942			_2ddc _cBK
999			_c22158 _d22158