000 00679nam a2200193Ia 4500
008 161214s9999 xx 000 0 und d
020 _a9783540927310
_c(hbk)
082 _223
_a621.38152
_bCER
100 _aCerofolini, G. F.
245 0 _aNanoscale devices : fabrication, functionalization, and accessibility from the macroscopic world
260 _aDordrecht:
_bSpringer,
_c2009
300 _axvi, 205 p.;
_bill. (some col.):
_c24 cm.
490 _aNanoscience and technology
650 _aMicroelectronics
650 _aMicroelectronics -- Mathematics
650 _aNanoelectromechanical systems
650 _aNanoelectromechanical systems -- Mathematics
942 _2ddc
_cBK
999 _c22558
_d22558