000			00576nam a2200181Ia 4500
008			161214s9999 xx 000 0 und d
020			_a9788181288967 _c(hbk)
082			_223 _a621.38152 _bCOL
100			_aColinge, Jean-Pierre
245		0	_aSilicon-on-insulator technology : materials to VLSI
250			_a3rd ed.
260			_aNew Delhi: _bSpringer, _c2008
300			_ax, 366 p.; _bill.: _c24 cm.
650			_aIntegrated circuits -- Very large scale integration -- Materials
650			_aSemiconductors
650			_aSilicon-on-insulator technology
942			_2ddc _cBK
999			_c23992 _d23992