| 000 | 00550nam a2200169Ia 4500 | ||
|---|---|---|---|
| 008 | 161214s9999 xx 000 0 und d | ||
| 020 |
_a9789812568236 _c(hbk) |
||
| 082 |
_223 _a621.38152 _bYOO |
||
| 100 | _aYoo, Chue San | ||
| 245 | 0 | _aSemiconductor manufacturing technology | |
| 260 |
_aSingapore: _bWorld Scientific, _c2008 |
||
| 300 |
_axii, 470 p.; _bill.: _c24 cm. |
||
| 490 | _aAdanced series in electrical and computer engineering | ||
| 650 | _aSemiconductor industry | ||
| 650 | _aSemiconductors -- Design and construction | ||
| 942 |
_2ddc _cBK |
||
| 999 |
_c24755 _d24755 |
||