000			00482nam a2200157Ia 4500
008			161214s9999 xx 000 0 und d
020			_a096167217X _c(hbk)
082			_223 _a621.38173 _bWOL
100			_aWolf, Stanley
245		0	_aSilicon processing for the VLSI era. Volume 4
260			_aCalifornia: _bLattice Press, _c2002
300			_axxii, 806 p.; _bill.: _c24 cm.
650			_aIntegrated circuits : very large scale
650			_aSemiconductors : etc.hing
942			_2ddc _cBK
999			_c25575 _d25575